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2- 32 Agilent B1500A User’s Guide, Edition 13

Introduction

Measurement Modules

MFCMU - Multi Frequency CMU

This section describes typical specification of the multi frequency capacitance

measurement unit (CMU). The CMU performs the impedance measurement and

returns the specified measurement data such as Cp-G. Only one module can be

installed in one mainframe.

• Measurement parameters: See Table 2-15.

• AC signal, output frequency:

1 kHz to 5 MHz

Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to),

or 1 Hz (1 MHz to 5 MHz)

• AC signal, output level:

10 mVrms to 250 mVrms, 1 mV resolution

•DC bias:

0 to ± 25 V, using MFCMU internal DC bias

0 to ± 100 V, using SMU and SCUU (SMU CMU unify unit)

• Measurement range:

For the fixed ranging mode, measurement range (impedance range) must be

specified to perform measurement.

Table 2-16 shows the available measurement

ranges and the corresponding impedance value. And Figure 2-7 shows the

calculation example of the impedance vs frequency characteristics of a

capacitive load. Use these information to decide the measurement range.

Impedance Z is calculated by the following formula.

Z = 1 / (2 f C)

where f is frequency (Hz) and C is capacitance (F).

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Agilent Technologies B1500A Uživatelská příručka Strana 74