Agilent Technologies Agilent E5250A Specifikace stáhnout pdf (Strana 8)

• Measurement Circuit Mode

If your device has large resistance

in series, it may be necessary to

convert measured parallel capaci-

tance (Cp) and conductance (G)

values obtained by E5250A capaci-

tance compensation to the capaci-

tance (Cs) and resistance (Rs)

values of a series equivalent

circuit. Calculate as follows:

where

measurement frequency.

• Noise Reduction

If your test room is electrically

noisy, do the following:

–Surround your wafer prober with

complete shield to prevent outside

electrical noise from going in, and

use shorter measurement cables.

–Use longer integration time to

average measurement errors.

Using higher test signal (oscilla-

tion) level is also effective because

signal-noise ratio will be higher.

Set them appropriately in 4284A

Setup dialog box (Figure 10)

in ICS.

Conclusion

By using Agilent E5250A’s Matrix

Switch Modules with capacitance

compensation for the Agilent 4284A

LCR Meter, you can perform accurate

capacitance measurements. Combining

with Agilent 4155C/4156C Parameter

Analyzer and Agilent ICS enables you

to integrate a low cost automatic

parametric test system for efficient

and accurate characterization and

evaluation of multiple devices.

Note: The information contained in

this application note is also applica-

ble to the Agilent 4155A/4156A and

Agilent 4155B/4156B.

Table 1. Ordering Example

For more information about Agilent

Technologies semiconductor test products,

applications, and services, visit our website:

www.agilent.com/go/semiconductor

or you can call one of the centers listed

and ask to speak with a semiconductor

test sales representative.

For more information about other Agilent

test and measurement products, go to

www.agilent.com

United States:

1 800 452 4844

Canada:

1 877 894 4414

Europe:

(31 20) 547 2000

Japan:

(81) 426 56 7832

Fax: (81) 426 56 7840

Latin America:

(305) 269 7500

Fax: (305) 269 7599

Australia/New Zealand:

1 800 629 485 (Australia)

Fax: (61 3) 9272 0749

0 800 738 378 (New Zealand)

Fax: (64 4) 495 8950

Asia Pacific:

(852) 2599 7889

Fax: (852) 2506 9233

Taiwan:

(886 2) 717 9524

Fax: (886) 2 718 9860

Korea:

(822) 769 0800

Fax: (822) 786 1083

Singapore:

(65) 1 800 292 8100

Fax: (65) 275 0387

Product specifications and descriptions in this

document subject to change without notice.

Copyright © 2000 Agilent Technologies

Printed in U.S.A. 11/00

5965-5658E

Cs = (1 + D

2

) Cp

D2 1

Rs = –––––– × ––

1 = D

2 G

G

D = ––––– , ω = 2πf, and f is

ωCp

E5250A (*) Low Leakage Switch Mainframe 1

001 10 x 12 Matrix Switch Card (E5252A) 4+

301 Relay Function Test Adapter 1

16494A Triaxial Cable 52+

001 Triaxial Cable (1.5 m) 48+

003 Triaxial Cable (80 cm) 4

4284A (*) Precision LCR Meter 1

001 Power Amplifier/ DC Bias 1

006 Compensation for 2 m /4 m Cable 1

4156A (*) Precision Semi. Para. Analyzer 1

010 Delete Kelvin Triaxial Cable Set 1

16495B Connector Plate 2+

002 Connector to contacts to soldering 2+

8120-4461 Low noise coaxial cable 2m x 48 +

16048E BNC Test Cable for 4284A (4 m) 1

1250-2405 BNC T-Connector for 16048E Cable 2

42091A Standalone Short Termination 1

10833A GPIB Cable (1 m) 2

10833B GPIB Cable (2 m) 1

E5230B Interactive Characterization Software 1

E5231B IV Driver Library 1

E5232B CV Driver Library 1

E5233B Switch Driver Library 1

* Select appropriate power line and localization options.

+ Decide appropriate numbers upon usage

A PC with supported GPIB interface is needed for ICS operation.

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