Agilent Technologies E5500 Series Uživatelská příručka stáhnout pdf (Strana 147)

Scanner Maintenance and Calibration 8

Agilent 5500 SPM User’s Guide 147

X Sensitivity

Using the Cross-section tool, measure the length of a set of features

across the scan (Figure 100).

Figure 100 Cross-section of several features to check Xsensitivity

If the measured dimension does not match the actual, then adjust the X

Sensitivity term according to the following equation:

After adjustment the measured size should be within 5 % of the actual

size.

Y Calibration

The methods used for calibrating the scanner’s Y axis are similar to

those used for the X dimension. The exception is that the scan range will

be set to ½ of the scanner’s full range. The Y axis is generally used as

NewSensitivity

CurrentSensitivity Kno wnSize

MeasuredSize

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Agilent Technologies E5500 Series Uživatelská příručka Strana 147