Agilent Technologies B1500A Uživatelská příručka stáhnout pdf (Strana 569)

Agilent B1500 User’s Guide, Edition 7 10-17

Application Library and Utilities

QSCV Measurement Supplemental Data

Considering Measurement Accuracy

NOTE The measurement accuracy is not the specifications but the reference data.

Applicable conditions for supplemental data: Leak current compensation function

ON, Offset cancel function ON, QSO mode OFF

The capacitance measurement accuracy can be calculated by the following formula:

Measurement accuracy = A (%) + B (F)

A: Reading accuracy. % accuracy of the measured value.

B: Offset accuracy.

where,

Tinteg: Integration time for the capacitance measurement, in seconds

Tleak: Integration time for the leakage current measurement, in seconds

Vstep: QSCV measurement voltage, in V

Rdut: Equivalent parallel resistance of DUT, in Ω

Cg: Guard capacitance of the measurement path, in F

Ax, Bx, Cx, and Dx values are the constant. For the values, see Table 10-2 for the

high resolution SMU (HRSMU), and Table 10-3 for the medium power/high power

SMU (MPSMU and HPSMU).

Calculation examples of the measurement accuracy are shown in Figure 10-6

through Figure 10-30. Conditions of the calculation are shown in Table 10-5.

NOTE Settings for the QSCV Measurement Mode

The measurement mode should be selected based on the measurement conditions.

Normal mode is effective for large leakage currents. The 4155C/4156C compatible

mode is effective if the leakage current is low, or the QSCV measurement voltage is

low.

AAp

Bp Cp Tinteg Dp

Tinteg

Tleak

-------------------

×+×+

Vstep

------------------------------------------------------------------------------------+=

B

Ao

Rdut

-------------

Bo Boc

+

Cg Co

(

Coc Cg

×+ )+×

Tinteg Do Doc Cg

)×+(

Tinteg

Tleak

-------------------

×+×

Vstep

--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------+=

1 2 ... 564 565 566 567 568 569 570 571 572 573 574 ... 627 628

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